JPH0134113Y2 - - Google Patents

Info

Publication number
JPH0134113Y2
JPH0134113Y2 JP1980090085U JP9008580U JPH0134113Y2 JP H0134113 Y2 JPH0134113 Y2 JP H0134113Y2 JP 1980090085 U JP1980090085 U JP 1980090085U JP 9008580 U JP9008580 U JP 9008580U JP H0134113 Y2 JPH0134113 Y2 JP H0134113Y2
Authority
JP
Japan
Prior art keywords
sample
ray
slit
electron beam
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980090085U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5717438U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980090085U priority Critical patent/JPH0134113Y2/ja
Publication of JPS5717438U publication Critical patent/JPS5717438U/ja
Application granted granted Critical
Publication of JPH0134113Y2 publication Critical patent/JPH0134113Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1980090085U 1980-06-27 1980-06-27 Expired JPH0134113Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980090085U JPH0134113Y2 (en]) 1980-06-27 1980-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980090085U JPH0134113Y2 (en]) 1980-06-27 1980-06-27

Publications (2)

Publication Number Publication Date
JPS5717438U JPS5717438U (en]) 1982-01-29
JPH0134113Y2 true JPH0134113Y2 (en]) 1989-10-17

Family

ID=29452098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980090085U Expired JPH0134113Y2 (en]) 1980-06-27 1980-06-27

Country Status (1)

Country Link
JP (1) JPH0134113Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134316U (en]) * 1974-09-04 1976-03-13
NL7806330A (nl) * 1978-06-12 1979-12-14 Philips Nv Roentgenspektrometer.

Also Published As

Publication number Publication date
JPS5717438U (en]) 1982-01-29

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